Get water on them NOW. Spray the eggs directly with water that is the same temp as the incubator, wet down the substrate and put a bowl of water in there too.

Your eggs are simply dehydrated.

You will probably get tiny wrinkly babies. The eggs will absorb some water which the desperately need. I've had the same thing happen with different substrates that dried out. It's hard to get them too moist if you have airflow but yours NEED water now.