Those are pretty bad. I had a clutch this year with that problem. I lost 4 babies (DOA in egg), 1 baby with kinks that is doing fine, and one hatch at 17 grams with one small eye and a short lower jaw (who is also doing okay). My clutch was not quite as deflated as yours. You could put a bottle of sterile saline in the incubator with them for a while then inject each egg with the sterile water until full then put a band-aid over the hole. I would use a very small gauge needle attached to a 60 mL syringe. Be sure to pinch the egg shell when putting the needle in so you do not inject the baby. This is probably the only thing you can do other than leave them alone and hope for the best.